At Shanghai Jiao Tong University, I engineered a butterfly resonant cavity for MPCVD plasma processing, achieving uniform electromagnetic field distribution across large-area substrates. This work supported scale-up toward 915 MHz high-power plasma systems.
I built end-to-end COMSOL Multiphysics workflows coupling electromagnetic fields, plasma chemistry, and thermal behavior, and mapped gas-chemistry operating windows to inform chamber tuning. I also modeled antenna and field performance in ANSYS HFSS before physical prototyping.
